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Lift-off protocols for thin films for use in EXAFS experiments

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Date

2013

Authors

Decoster, Stefan
Glover, C J
Johannessen, B
Giulian, R
Sprouster, David
Kluth, Patrick
Araujo, L L
Hussain, Zohair
Schnohr, Claudia
Salama, Hazar

Journal Title

Journal ISSN

Volume Title

Publisher

Munksgaard International Publishers

Abstract

Lift-off protocols for thin films for improved extended X-ray absorption fine structure (EXAFS) measurements are presented. Using wet chemical etching of the substrate or the interlayer between the thin film and the substrate, stand-alone high-quality mic

Description

Keywords

Keywords: EXAFS; Experimental techniques; Extended X-ray absorption fine structure measurements; lift-off; Lift-off procedures; Sample preparation methods; Sample preparation procedure; Small angle X-ray scattering; Amorphous semiconductors; Dielectric materials; E dielectric; EXAFS; lift-off; semiconductor; thin film

Citation

URI

http://hdl.handle.net/1885/72527

Collections

ANU Research Publications

Source

Journal of Synchrotron Radiation

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1107/S0909049513005049

Restricted until

2037-12-31

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01_Decoster_Lift-off_protocols_for_thin_2013.pdf (1.09 MB)

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