Structural Changes in Ultra-High-Dose Self-Implanted Crystalline and Amorphous Silicon

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dc.contributor.authorZhu, Xiaohua
dc.contributor.authorWilliams, James
dc.contributor.authorMcCallum, J.
dc.date.accessioned2015-12-13T23:34:19Z
dc.date.issued1999
dc.date.updated2015-12-12T09:35:34Z
dc.description.abstractUltra-high-dose Si ion implantation (1×1018 cm-2) into both amorphous and crystalline Si has been studied as a function of implantation temperature from liquid nitrogen to 250°C. The samples were analysed before and after 600°C annealing by Rutherford
dc.identifier.issn0168-583X
dc.identifier.urihttp://hdl.handle.net/1885/93410
dc.publisherElsevier
dc.sourceNuclear Instruments and Methods in Physics Research: Section B
dc.subjectKeywords: Cross-sectional transmission electron microscopy (XTEM); Amorphous films; Amorphous silicon; Crystal defects; Crystalline materials; Crystallization; Epitaxial growth; High temperature effects; Ion bombardment; Ion implantation; Radiation damage; Reaction Amorphous and crystalline silicon; Complex crystal defect; High dose self-implantation; Regrowth
dc.titleStructural Changes in Ultra-High-Dose Self-Implanted Crystalline and Amorphous Silicon
dc.typeJournal article
local.bibliographicCitation.lastpage272
local.bibliographicCitation.startpage268
local.contributor.affiliationZhu, Xiaohua, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWilliams, James, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMcCallum, J, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidZhu, Xiaohua, u4046809
local.contributor.authoruidWilliams, James, u8809701
local.contributor.authoruidMcCallum, J, u9902178
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor020203 - Particle Physics
local.identifier.ariespublicationMigratedxPub24752
local.identifier.citationvolume148
local.identifier.scopusID2-s2.0-0033513654
local.type.statusPublished Version

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