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Tellurium oxide thin film waveguides for integrated photonics

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dc.contributor.authorVu, Khu
dc.contributor.authorMadden, Steve
dc.coverage.spatialCairns Australia
dc.date.accessioned2015-12-10T23:33:06Z
dc.date.available2015-12-10T23:33:06Z
dc.date.createdJuly 10-14 2011
dc.date.issued2012
dc.date.updated2016-02-24T08:51:56Z
dc.description.abstractWe report the fabrication of Tellurium oxide films with deposited propagation losses that are sufficiently low to allow the fabrication of high quality planar integrated optical devices. Stoichiometric low loss films were produced by reactive magnetron RF sputtering and the effect of a wide range of sputtering parameters on stoichiometry, refractive index, Raman spectra and optical loss of thin films were investigated. As deposited TeO2 films with propagation losses below 0.1 dB/cm at 1550nm have been achieved which are therefore well suited for integrated optical applications.
dc.identifier.isbn9781118273746
dc.identifier.urihttp://hdl.handle.net/1885/69146
dc.publisherConference Organising Committee
dc.relation.ispartofseriesInternational Conference on Advances in the Fusion and Processing of Glass and Symposium 15 - Structure, Properties and Photonic Applications of Glasses AFPG-9
dc.sourceCeramic Transactions
dc.subjectKeywords: High quality; Integrated optical devices; Integrated photonics; Optical applications; Propagation loss; Rf-sputtering; Sputtering parameters; Tellurium oxide; Tellurium oxide films; Integrated optics; Optical glass; Oxide films; Photonics; Refractive inde
dc.titleTellurium oxide thin film waveguides for integrated photonics
dc.typeConference paper
local.bibliographicCitation.lastpage186
local.bibliographicCitation.startpage181
local.contributor.affiliationVu, Khu, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMadden, Steve, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidVu, Khu, u2515789
local.contributor.authoruidMadden, Steve, u4151700
local.description.notesImported from ARIES
local.identifier.absfor020500 - OPTICAL PHYSICS
local.identifier.ariespublicationf5625xPUB1934
local.identifier.doi10.1002/9781118472590.ch21
local.identifier.scopusID2-s2.0-84866444420
local.type.statusPublished Version

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