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An experimental and analytical study of an asymmetric capacitively coupled plasma used for plasma polymerization

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Date

2014

Authors

Michelmore, Andrew
Whittle, Jason D
Short, Rob
Boswell, Roderick
Charles, Christine

Journal Title

Journal ISSN

Volume Title

Publisher

Wiley - V C H Verlag GmbbH & Co.

Abstract

Plasma processing is widely used to provide novel surface modifications to materials for a variety of applications. Typically, the systems used to carry out these modifications are poorly characterised. Here we describe the basics of a global model for a

Description

Keywords

Citation

URI

http://hdl.handle.net/1885/75804

Collections

ANU Research Publications

Source

Plasma Processes and Polymers

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1002/ppap.201400026

Restricted until

2037-12-31

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01_Michelmore_An_experimental_and_analytical_2014.pdf (601.51 KB)

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