An experimental and analytical study of an asymmetric capacitively coupled plasma used for plasma polymerization

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Authors

Michelmore, Andrew
Whittle, Jason D
Short, Rob
Boswell, Roderick
Charles, Christine

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Wiley - V C H Verlag GmbbH & Co.

Abstract

Plasma processing is widely used to provide novel surface modifications to materials for a variety of applications. Typically, the systems used to carry out these modifications are poorly characterised. Here we describe the basics of a global model for a

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Plasma Processes and Polymers

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Restricted until

2037-12-31