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Comparison between experiment and two simulation strategies for the extraction of focused ion beams

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dc.contributor.authorSutherland, Orson
dc.contributor.authorBoswell, Roderick
dc.contributor.authorKeller, J
dc.contributor.authorIrzyk, M
dc.date.accessioned2015-12-13T22:50:48Z
dc.date.available2015-12-13T22:50:48Z
dc.date.issued2004
dc.date.updated2015-12-11T10:42:19Z
dc.description.abstractA typical ray-tracing code, PBgun, was compared to a particle-in-cell (PIC) code called simulation d'extraction de faisceaux d'ions (SEFI) and a single aperture, three electrode extraction experiment. Medium current extraction from a high density plasma source with a three electrode extraction system was described. It was shown that SEFI could accurately predict the function of extracted current versus extraction voltage and that PBgun gave accurate simulations when the current or current density could be specified near the meniscus. It was found that both codes had some error from beam crossing near the axis which changed the amount of meniscus curvature predicted.
dc.identifier.issn0034-6748
dc.identifier.urihttp://hdl.handle.net/1885/80965
dc.publisherAmerican Institute of Physics (AIP)
dc.sourceReview of Scientific Instruments
dc.subjectKeywords: Aberrations; Computer simulation; Current density; Data reduction; Electric potential; Electrodes; Error analysis; Interfaces (materials); Oscillations; Plasma density; Plasma sheaths; Plasma sources; Ray tracing; Focused ion beams (FIB); High density pla
dc.titleComparison between experiment and two simulation strategies for the extraction of focused ion beams
dc.typeJournal article
local.bibliographicCitation.issue7
local.bibliographicCitation.lastpage86
local.bibliographicCitation.startpage2379
local.contributor.affiliationSutherland, Orson, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationBoswell, Roderick, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationKeller, J, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationIrzyk, M, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidSutherland, Orson, u9708862
local.contributor.authoruidBoswell, Roderick, u8000743
local.contributor.authoruidKeller, J, u870044
local.contributor.authoruidIrzyk, M, t381
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor020204 - Plasma Physics; Fusion Plasmas; Electrical Discharges
local.identifier.ariespublicationMigratedxPub9274
local.identifier.citationvolume75
local.identifier.doi10.1063/1.1753669
local.identifier.scopusID2-s2.0-3843100287
local.type.statusPublished Version

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