Comparison between experiment and two simulation strategies for the extraction of focused ion beams

Abstract

A typical ray-tracing code, PBgun, was compared to a particle-in-cell (PIC) code called simulation d'extraction de faisceaux d'ions (SEFI) and a single aperture, three electrode extraction experiment. Medium current extraction from a high density plasma source with a three electrode extraction system was described. It was shown that SEFI could accurately predict the function of extracted current versus extraction voltage and that PBgun gave accurate simulations when the current or current density could be specified near the meniscus. It was found that both codes had some error from beam crossing near the axis which changed the amount of meniscus curvature predicted. Show more