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Non-linear direct-write lithography for semiconductor nanowire characterisation

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dc.contributor.authorParkinson, Patricken_AU
dc.contributor.authorPeng, Kunen_AU
dc.contributor.authorJiang, Nianen_AU
dc.contributor.authorGao, Qiangen_AU
dc.contributor.authorJagadish, Chennupatien_AU
dc.contributor.authorTan, Hark Hoeen_AU
dc.coverage.spatialMelbourne Australia
dc.date.accessioned2015-12-10T22:54:57Z
dc.date.createdDecember 12-14 2012
dc.date.issued2012
dc.date.updated2016-02-24T10:19:26Z
dc.description.abstractA non-linear photolithography technique is presented, providing a new, rapid and damage-free method of contacting semiconductor nanowires. In addition, by using nanowires with room-temperature luminescence, a through-resist photoluminescence step provides a verifiable route to contacting high-quality wires [1].
dc.identifier.isbn9781467330459
dc.identifier.urihttp://hdl.handle.net/1885/59878
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE Inc)
dc.relation.ispartofseriesConference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2012)
dc.sourceCOMMAD 2012 Proceedings
dc.source.urihttp://commad2012.physics.unimelb.edu.au/
dc.subjectKeywords: Damage-free; High quality; Room temperature; Semiconductor nanowire; Microelectronics; Photolithography; Nanowires
dc.titleNon-linear direct-write lithography for semiconductor nanowire characterisation
dc.typeConference paper
local.bibliographicCitation.lastpage136
local.bibliographicCitation.startpage135
local.contributor.affiliationParkinson, Patrick, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationPeng, Kun, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJiang, Nian, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationGao, Qiang, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationTan, Hoe Hark, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidParkinson, Patrick, u4869537
local.contributor.authoruidPeng, Kun, u5096262
local.contributor.authoruidJiang, Nian, u4902336
local.contributor.authoruidGao, Qiang, u4006742
local.contributor.authoruidTan, Hoe Hark, u9302338
local.contributor.authoruidJagadish, Chennupati, u9212349
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor100706 - Nanofabrication, Growth and Self Assembly
local.identifier.absfor091204 - Elemental Semiconductors
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
local.identifier.ariespublicationU3594520xPUB512
local.identifier.doi10.1109/COMMAD.2012.6472397
local.identifier.scopusID2-s2.0-84875621383
local.type.statusPublished Version

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