Non-linear direct-write lithography for semiconductor nanowire characterisation

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Parkinson, Patrick
Peng, Kun
Jiang, Nian
Gao, Qiang
Jagadish, Chennupati
Tan, Hark Hoe

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Institute of Electrical and Electronics Engineers (IEEE Inc)

Abstract

A non-linear photolithography technique is presented, providing a new, rapid and damage-free method of contacting semiconductor nanowires. In addition, by using nanowires with room-temperature luminescence, a through-resist photoluminescence step provides a verifiable route to contacting high-quality wires [1].

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COMMAD 2012 Proceedings

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2037-12-31