EXAFS Measurements of Metal-decorated Nanocavities in Si
| dc.contributor.author | de Azevedo, Gustavo | |
| dc.contributor.author | Ridgway, Mark C | |
| dc.contributor.author | Betlehem, J | |
| dc.contributor.author | Yu, Kin Man | |
| dc.contributor.author | Glover, C J | |
| dc.contributor.author | Foran, Garry J | |
| dc.date.accessioned | 2015-12-13T23:08:08Z | |
| dc.date.available | 2015-12-13T23:08:08Z | |
| dc.date.issued | 2003 | |
| dc.date.updated | 2015-12-12T08:12:23Z | |
| dc.description.abstract | The metal-decorated nanocavities in Si were discussed using EXAFS measurements. A sample preparation methodology to enable the identification with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates was elaborated. The preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities were also presented. | |
| dc.identifier.issn | 0168-583X | |
| dc.identifier.uri | http://hdl.handle.net/1885/86537 | |
| dc.publisher | Elsevier | |
| dc.source | Nuclear Instruments and Methods in Physics Research: Section B | |
| dc.subject | Keywords: Chemical bonds; Copper compounds; Crystal impurities; Nanostructured materials; Synchrotron radiation; X ray analysis; Nanocavities; Silicon Cavities; EXAFS; Gettering; Silicon; Voids | |
| dc.title | EXAFS Measurements of Metal-decorated Nanocavities in Si | |
| dc.type | Journal article | |
| local.bibliographicCitation.lastpage | 184 | |
| local.bibliographicCitation.startpage | 179 | |
| local.contributor.affiliation | de Azevedo, Gustavo, College of Physical and Mathematical Sciences, ANU | |
| local.contributor.affiliation | Ridgway, Mark C, College of Physical and Mathematical Sciences, ANU | |
| local.contributor.affiliation | Betlehem, J, College of Physical and Mathematical Sciences, ANU | |
| local.contributor.affiliation | Yu, Kin Man, Lawrence Livermore National Laboratory | |
| local.contributor.affiliation | Glover, C J, Uppsala University | |
| local.contributor.affiliation | Foran, Garry J, Australian Nuclear Science and Technology Organisation | |
| local.contributor.authoruid | de Azevedo, Gustavo, u4047534 | |
| local.contributor.authoruid | Ridgway, Mark C, u9001886 | |
| local.contributor.authoruid | Betlehem, J, u4016717 | |
| local.description.notes | Imported from ARIES | |
| local.description.refereed | Yes | |
| local.identifier.absfor | 090699 - Electrical and Electronic Engineering not elsewhere classified | |
| local.identifier.ariespublication | MigratedxPub15445 | |
| local.identifier.citationvolume | 199 | |
| local.identifier.doi | 10.1016/S0168-583X(02)01430-1 | |
| local.identifier.scopusID | 2-s2.0-0037244293 | |
| local.type.status | Published Version |