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EXAFS Measurements of Metal-decorated Nanocavities in Si

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Date

2003

Authors

de Azevedo, Gustavo
Ridgway, Mark C
Betlehem, J
Yu, Kin Man
Glover, C J
Foran, Garry J

Journal Title

Journal ISSN

Volume Title

Publisher

Elsevier

Abstract

The metal-decorated nanocavities in Si were discussed using EXAFS measurements. A sample preparation methodology to enable the identification with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates was elaborated. The preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities were also presented.

Description

Keywords

Keywords: Chemical bonds; Copper compounds; Crystal impurities; Nanostructured materials; Synchrotron radiation; X ray analysis; Nanocavities; Silicon Cavities; EXAFS; Gettering; Silicon; Voids

Citation

URI

http://hdl.handle.net/1885/86537

Collections

ANU Research Publications

Source

Nuclear Instruments and Methods in Physics Research: Section B

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1016/S0168-583X(02)01430-1

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