Single-step RIE fabrication process of low loss InP waveguide using CH 4 /H 2 chemistry

dc.contributor.authorLysevych, Mykhayloen_AU
dc.contributor.authorKarouta, Fouaden_AU
dc.contributor.authorJagadish, Chennupatien_AU
dc.contributor.authorTan, Hark Hoeen_AU
dc.date.accessioned2015-12-10T23:22:24Z
dc.date.issued2011
dc.date.updated2016-02-24T08:12:09Z
dc.description.abstractSingle-step C H4 / H2 -based reactive ion etching (RIE) process, without alternating O2 plasma treatment, has been developed with virtually no polymer buildup on the etched surface. InP ridge waveguides up to 1.9 μm high were etched without any mid- or p
dc.identifier.issn0013-4651
dc.identifier.urihttp://hdl.handle.net/1885/66502
dc.publisherElectrochemical Society Inc
dc.sourceJournal of the Electrochemical Society
dc.subjectKeywords: Etched surface; Fabrication process; InP; Low loss; Plasma treatment; Ridge waveguides; Root mean square roughness; Single-step; Waveguide propagation; Electric losses; Plasma applications; Waveguides; Reactive ion etching
dc.titleSingle-step RIE fabrication process of low loss InP waveguide using CH 4 /H 2 chemistry
dc.typeJournal article
local.bibliographicCitation.issue3
local.bibliographicCitation.lastpageH284
local.bibliographicCitation.startpageH281
local.contributor.affiliationLysevych, Mykhaylo, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationTan, Hoe Hark, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationKarouta, Fouad, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.contributor.authoremailu4185056@anu.edu.au
local.contributor.authoruidLysevych, Mykhaylo, u4185056
local.contributor.authoruidTan, Hoe Hark, u9302338
local.contributor.authoruidKarouta, Fouad, u4703981
local.contributor.authoruidJagadish, Chennupati, u9212349
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor020105 - General Relativity and Gravitational Waves
local.identifier.ariespublicationf2965xPUB1295
local.identifier.citationvolume158
local.identifier.doi10.1149/1.3532767
local.identifier.scopusID2-s2.0-79551576696
local.identifier.thomsonID000286677900079
local.identifier.uidSubmittedByf2965
local.type.statusPublished Version

Downloads

Original bundle

Now showing 1 - 2 of 2
Loading...
Thumbnail Image
Name:
01_Lysevych_Single-step_RIE_fabrication_2011.pdf
Size:
947.26 KB
Format:
Adobe Portable Document Format
Loading...
Thumbnail Image
Name:
02_Lysevych_Single-step_RIE_fabrication_2011.pdf
Size:
280.62 KB
Format:
Adobe Portable Document Format
Back to topicon-arrow-up-solid
 
APRU
IARU
 
edX
Group of Eight Member

Acknowledgement of Country

The Australian National University acknowledges, celebrates and pays our respects to the Ngunnawal and Ngambri people of the Canberra region and to all First Nations Australians on whose traditional lands we meet and work, and whose cultures are among the oldest continuing cultures in human history.


Contact ANUCopyrightDisclaimerPrivacyFreedom of Information

+61 2 6125 5111 The Australian National University, Canberra

TEQSA Provider ID: PRV12002 (Australian University) CRICOS Provider Code: 00120C ABN: 52 234 063 906