Single-step RIE fabrication process of low loss InP waveguide using CH 4 /H 2 chemistry
dc.contributor.author | Lysevych, Mykhaylo | en_AU |
dc.contributor.author | Karouta, Fouad | en_AU |
dc.contributor.author | Jagadish, Chennupati | en_AU |
dc.contributor.author | Tan, Hark Hoe | en_AU |
dc.date.accessioned | 2015-12-10T23:22:24Z | |
dc.date.issued | 2011 | |
dc.date.updated | 2016-02-24T08:12:09Z | |
dc.description.abstract | Single-step C H4 / H2 -based reactive ion etching (RIE) process, without alternating O2 plasma treatment, has been developed with virtually no polymer buildup on the etched surface. InP ridge waveguides up to 1.9 μm high were etched without any mid- or p | |
dc.identifier.issn | 0013-4651 | |
dc.identifier.uri | http://hdl.handle.net/1885/66502 | |
dc.publisher | Electrochemical Society Inc | |
dc.source | Journal of the Electrochemical Society | |
dc.subject | Keywords: Etched surface; Fabrication process; InP; Low loss; Plasma treatment; Ridge waveguides; Root mean square roughness; Single-step; Waveguide propagation; Electric losses; Plasma applications; Waveguides; Reactive ion etching | |
dc.title | Single-step RIE fabrication process of low loss InP waveguide using CH 4 /H 2 chemistry | |
dc.type | Journal article | |
local.bibliographicCitation.issue | 3 | |
local.bibliographicCitation.lastpage | H284 | |
local.bibliographicCitation.startpage | H281 | |
local.contributor.affiliation | Lysevych, Mykhaylo, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Tan, Hoe Hark, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Karouta, Fouad, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Jagadish, Chennupati, College of Physical and Mathematical Sciences, ANU | |
local.contributor.authoremail | u4185056@anu.edu.au | |
local.contributor.authoruid | Lysevych, Mykhaylo, u4185056 | |
local.contributor.authoruid | Tan, Hoe Hark, u9302338 | |
local.contributor.authoruid | Karouta, Fouad, u4703981 | |
local.contributor.authoruid | Jagadish, Chennupati, u9212349 | |
local.description.embargo | 2037-12-31 | |
local.description.notes | Imported from ARIES | |
local.identifier.absfor | 020105 - General Relativity and Gravitational Waves | |
local.identifier.ariespublication | f2965xPUB1295 | |
local.identifier.citationvolume | 158 | |
local.identifier.doi | 10.1149/1.3532767 | |
local.identifier.scopusID | 2-s2.0-79551576696 | |
local.identifier.thomsonID | 000286677900079 | |
local.identifier.uidSubmittedBy | f2965 | |
local.type.status | Published Version |