In-situ Microscopy Study of Nanocavity Shrinkage in Si under Ion Beam Irradiation

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dc.contributor.authorRuault, M-O
dc.contributor.authorRidgway, Mark C
dc.contributor.authorFortuna, Frank Nicholas
dc.contributor.authorBernas, Harry
dc.contributor.authorWilliams, James
dc.date.accessioned2015-12-13T23:09:14Z
dc.date.available2015-12-13T23:09:14Z
dc.date.issued2003
dc.date.updated2015-12-12T08:18:15Z
dc.description.abstractWe report an in situ transmission electron microscopy (TEM) study of nanocavity evolution in amorphous Si (a-Si) under ion beam irradiation. The size evolution of the nanocavities was monitored during ion irradiation with Si or As at various temperatures
dc.identifier.issn1286-0042
dc.identifier.urihttp://hdl.handle.net/1885/86903
dc.publisherEDP Sciences
dc.sourceEuropean Physical Journal - Applied Physics
dc.subjectKeywords: Crystalline materials; Irradiation; Shrinkage; Temperature; Transmission electron microscopy; Ion beam irradiation; Ion radiation effects; Irradiation-induced atomic displacement rate; Irradiation-induced nanocavity shrinkage; Amorphous silicon
dc.titleIn-situ Microscopy Study of Nanocavity Shrinkage in Si under Ion Beam Irradiation
dc.typeJournal article
local.bibliographicCitation.lastpage40
local.bibliographicCitation.startpage39
local.contributor.affiliationRuault, M-O, Universite Paris
local.contributor.affiliationRidgway, Mark C, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationFortuna, Frank Nicholas, Universite d'Evry
local.contributor.affiliationBernas, Harry, CNRS
local.contributor.affiliationWilliams, James, College of Physical and Mathematical Sciences, ANU
local.contributor.authoremailu9001886@anu.edu.au
local.contributor.authoruidRidgway, Mark C, u9001886
local.contributor.authoruidWilliams, James, u8809701
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.ariespublicationMigratedxPub15959
local.identifier.citationvolume23
local.identifier.scopusID2-s2.0-0038115168
local.identifier.uidSubmittedByMigrated
local.type.statusPublished Version

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