In-situ Microscopy Study of Nanocavity Shrinkage in Si under Ion Beam Irradiation

Ruault, M-O; Ridgway, Mark C; Fortuna, Frank Nicholas; Bernas, Harry; Williams, James

In-situ Microscopy Study of Nanocavity Shrinkage in Si under Ion Beam Irradiation

Date

2003

Authors

Ruault, M-O

Ridgway, Mark C

Fortuna, Frank Nicholas

Bernas, Harry

Williams, James

Publisher

EDP Sciences

Abstract

We report an in situ transmission electron microscopy (TEM) study of nanocavity evolution in amorphous Si (a-Si) under ion beam irradiation. The size evolution of the nanocavities was monitored during ion irradiation with Si or As at various temperatures

Keywords

Keywords: Crystalline materials; Irradiation; Shrinkage; Temperature; Transmission electron microscopy; Ion beam irradiation; Ion radiation effects; Irradiation-induced atomic displacement rate; Irradiation-induced nanocavity shrinkage; Amorphous silicon

URI

http://hdl.handle.net/1885/86903

Collections

ANU Research Publications

Source

European Physical Journal - Applied Physics

Type

Journal article

Full item page

In-situ Microscopy Study of Nanocavity Shrinkage in Si under Ion Beam Irradiation

Date

Authors

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Citation

URI

Collections

Source

Type

Book Title

Entity type

Access Statement

License Rights

DOI

Restricted until