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In-situ Microscopy Study of Nanocavity Shrinkage in Si under Ion Beam Irradiation

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Date

2003

Authors

Ruault, M-O
Ridgway, Mark C
Fortuna, Frank Nicholas
Bernas, Harry
Williams, James

Journal Title

Journal ISSN

Volume Title

Publisher

EDP Sciences

Abstract

We report an in situ transmission electron microscopy (TEM) study of nanocavity evolution in amorphous Si (a-Si) under ion beam irradiation. The size evolution of the nanocavities was monitored during ion irradiation with Si or As at various temperatures

Description

Keywords

Keywords: Crystalline materials; Irradiation; Shrinkage; Temperature; Transmission electron microscopy; Ion beam irradiation; Ion radiation effects; Irradiation-induced atomic displacement rate; Irradiation-induced nanocavity shrinkage; Amorphous silicon

Citation

URI

http://hdl.handle.net/1885/86903

Collections

ANU Research Publications

Source

European Physical Journal - Applied Physics

Type

Journal article

Book Title

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