In-situ Microscopy Study of Nanocavity Shrinkage in Si under Ion Beam Irradiation
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Authors
Ruault, M-O
Ridgway, Mark C
Fortuna, Frank Nicholas
Bernas, Harry
Williams, James
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EDP Sciences
Abstract
We report an in situ transmission electron microscopy (TEM) study of nanocavity evolution in amorphous Si (a-Si) under ion beam irradiation. The size evolution of the nanocavities was monitored during ion irradiation with Si or As at various temperatures
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European Physical Journal - Applied Physics