Cultural advice

The Australian National University acknowledges, celebrates and pays our respects to the Ngunnawal and Ngambri people of the Canberra region and to all First Nations Australians on whose traditional lands we meet and work, and whose cultures are among the oldest continuing cultures in human history.

Aboriginal and Torres Strait Islander peoples are advised that ANU Library collections may include images, names, voices, and other representations of deceased persons.

Material in the collection may contain terms, language or views that reflect the period in which the item was created and may be considered inappropriate today.

Achieving a narrow size distribution of Au particles at a precise depth in SiO2 by segregation of Au precipitates

Simple item page
dc.contributor.authorCharnvanichborikarn, Supakit
dc.contributor.authorConway, Martin
dc.contributor.authorWong-Leung, Jennifer
dc.contributor.authorWilliams, James
dc.date.accessioned2015-12-07T22:16:13Z
dc.date.issued2009
dc.date.updated2016-02-24T09:52:55Z
dc.description.abstractWe propose a new method of confining Au nanoparticles of a narrow size distribution at a precise depth in an SiO2 matrix. The process involves the formation of nanocavities in silicon by hydrogen implantation and annealing (at 850 °C), followed by Au get
dc.identifier.issn0957-4484
dc.identifier.urihttp://hdl.handle.net/1885/17936
dc.publisherInstitute of Physics Publishing
dc.sourceNanotechnology
dc.subjectKeywords: Au nanoparticles; Au particles; Average diameters; Before and after; Buried oxide layers; Gettering; Hydrogen implantations; matrixes; Nano-cavities; Narrow size distributions; Silicon-on-insulator wafers; Wet oxidations; Hydrogen; Oxidation; Semiconducti
dc.titleAchieving a narrow size distribution of Au particles at a precise depth in SiO2 by segregation of Au precipitates
dc.typeJournal article
local.bibliographicCitation.issue18
local.bibliographicCitation.startpage6
local.contributor.affiliationCharnvanichborikarn, Supakit, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationConway, Martin, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWong-Leung, Yin-Yin (Jennifer), College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWilliams, James, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidCharnvanichborikarn, Supakit, u3251081
local.contributor.authoruidConway, Martin, u9300106
local.contributor.authoruidWong-Leung, Yin-Yin (Jennifer), u9607716
local.contributor.authoruidWilliams, James, u8809701
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor020406 - Surfaces and Structural Properties of Condensed Matter
local.identifier.absfor091204 - Elemental Semiconductors
local.identifier.ariespublicationu3251081xPUB3
local.identifier.citationvolume20
local.identifier.doi10.1088/0957-4484/20/18/185603
local.identifier.scopusID2-s2.0-65549154914
local.identifier.thomsonID000265252900018
local.type.statusPublished Version

Downloads

Original bundle

Now showing 1 - 1 of 1
Thumbnail Image
Name:
01_Charnvanichborikarn_Achieving_a_narrow_size_2009.pdf
Size:
708.77 KB
Format:
Adobe Portable Document Format
Download

Collections

ANU Research Publications

DSpace software copyright © 2002-2026 LYRASIS

abcd