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Achieving a narrow size distribution of Au particles at a precise depth in SiO2 by segregation of Au precipitates

Date

Authors

Charnvanichborikarn, Supakit

Conway, Martin

Wong-Leung, Jennifer

Williams, James

Publisher

Institute of Physics Publishing

Abstract

We propose a new method of confining Au nanoparticles of a narrow size distribution at a precise depth in an SiO2 matrix. The process involves the formation of nanocavities in silicon by hydrogen implantation and annealing (at 850 °C), followed by Au get

Keywords

Keywords: Au nanoparticles; Au particles; Average diameters; Before and after; Buried oxide layers; Gettering; Hydrogen implantations; matrixes; Nano-cavities; Narrow size distributions; Silicon-on-insulator wafers; Wet oxidations; Hydrogen; Oxidation; Semiconducti

URI

http://hdl.handle.net/1885/17936

Collections

ANU Research Publications

Source

Nanotechnology

Type

Journal article

DOI

10.1088/0957-4484/20/18/185603

Restricted until

2037-12-31

Downloads

File

Description

01_Charnvanichborikarn_Achieving_a_narrow_size_2009.pdf (708.77 KB)

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