Passivation of highly boron doped silicon surfaces by sputtered AlOx and PECVD SiN, a comparison
dc.contributor.author | Li, Tsu-Tsung (Andrew) | |
dc.contributor.author | Cuevas, Andres | |
dc.contributor.author | Tan, Jason | |
dc.contributor.author | Samundsett, Christian | |
dc.contributor.author | Saynova, D. | |
dc.contributor.author | Geerligs, B. | |
dc.coverage.spatial | Canberra Australia | |
dc.date.accessioned | 2015-12-10T23:07:53Z | |
dc.date.created | December 12-15 2010 | |
dc.date.issued | 2010 | |
dc.date.updated | 2016-02-24T11:02:56Z | |
dc.description.abstract | We show that boron-diffused emitters can be passivated with AlOx deposited using RF sputtering of an Al target. The surface passivation achieved so far is inferior to that obtained using an optimised PECDV SiN process that includes a chemically grown SiO2 interfacial layer. Nevertheless, the levels of passivation obtained, expressed by emitter recombination current densities of JoE=228-349 fA/cm2 for sheet resistances of 88-210 Ω/□, are already consistent with solar cell with efficiencies in the 20% range. | |
dc.identifier.isbn | 9781424473335 | |
dc.identifier.uri | http://hdl.handle.net/1885/63054 | |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE Inc) | |
dc.relation.ispartofseries | Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD 2010) | |
dc.source | 2010 conference on Optoelectronic and Microelectronic Materials and Devices Proceedings | |
dc.source.uri | http://commad2010.anu.edu.au/ | |
dc.subject | Keywords: Boron-doped silicon; Interfacial layer; Recombination currents; Rf-sputtering; Surface passivation; Boron; Electric resistance; Microelectronics; Silicon nitride; Silicon oxides; Passivation | |
dc.title | Passivation of highly boron doped silicon surfaces by sputtered AlOx and PECVD SiN, a comparison | |
dc.type | Conference paper | |
local.bibliographicCitation.lastpage | 126 | |
local.bibliographicCitation.startpage | 125 | |
local.contributor.affiliation | Li, Tsu-Tsung (Andrew), College of Engineering and Computer Science, ANU | |
local.contributor.affiliation | Cuevas, Andres, College of Engineering and Computer Science, ANU | |
local.contributor.affiliation | Tan, Jason, College of Engineering and Computer Science, ANU | |
local.contributor.affiliation | Samundsett, Christian, College of Engineering and Computer Science, ANU | |
local.contributor.affiliation | Saynova, D., Energy Research Centre of the Netherlands | |
local.contributor.affiliation | Geerligs, B., Energy Research Centre of the Netherlands | |
local.contributor.authoremail | u9308750@anu.edu.au | |
local.contributor.authoruid | Li, Tsu-Tsung (Andrew), u4436010 | |
local.contributor.authoruid | Cuevas, Andres, u9308750 | |
local.contributor.authoruid | Tan, Jason, u4099750 | |
local.contributor.authoruid | Samundsett, Christian, u9710649 | |
local.description.embargo | 2037-12-31 | |
local.description.notes | Imported from ARIES | |
local.description.refereed | Yes | |
local.identifier.absfor | 090605 - Photodetectors, Optical Sensors and Solar Cells | |
local.identifier.absseo | 850504 - Solar-Photovoltaic Energy | |
local.identifier.ariespublication | u4334215xPUB764 | |
local.identifier.doi | 10.1109/COMMAD.2010.5699694 | |
local.identifier.scopusID | 2-s2.0-79951760212 | |
local.identifier.uidSubmittedBy | u4334215 | |
local.type.status | Published Version |
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