Passivation of highly boron doped silicon surfaces by sputtered AlOx and PECVD SiN, a comparison
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Li, Tsu-Tsung (Andrew)
Cuevas, Andres
Tan, Jason
Samundsett, Christian
Saynova, D.
Geerligs, B.
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Institute of Electrical and Electronics Engineers (IEEE Inc)
Abstract
We show that boron-diffused emitters can be passivated with AlOx deposited using RF sputtering of an Al target. The surface passivation achieved so far is inferior to that obtained using an optimised PECDV SiN process that includes a chemically grown SiO2 interfacial layer. Nevertheless, the levels of passivation obtained, expressed by emitter recombination current densities of JoE=228-349 fA/cm2 for sheet resistances of 88-210 Ω/□, are already consistent with solar cell with efficiencies in the 20% range.
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2010 conference on Optoelectronic and Microelectronic Materials and Devices Proceedings
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2037-12-31
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