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Optical frequency comb generation using low stress reactive sputtered silicon nitride waveguides

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dc.contributor.authorFrigg, Andreas
dc.contributor.authorBoes, Andreas
dc.contributor.authorRen, Guanghui
dc.contributor.authorNguyen, Thach
dc.contributor.authorChoi, Duk-Yong
dc.contributor.authorGees, Silvio
dc.contributor.authorMoss, David J
dc.contributor.authorMitchell, Arnan
dc.coverage.spatialSydney, Australia
dc.date.accessioned2022-10-17T22:24:12Z
dc.date.created3-5 August 2020
dc.date.issued2020
dc.date.updated2021-11-28T07:23:36Z
dc.description.abstractWe demonstrate fully CMOS-compatible anomalous dispersive SiN microring resonators with an intrinsic Q factor of 6. 6\times 10^{5} based on reactive sputtering SiN, yielding in a 250 nm wide modulation-instability frequency comb.en_AU
dc.format.mimetypeapplication/pdfen_AU
dc.identifier.isbn978-0-646-82504-5en_AU
dc.identifier.urihttp://hdl.handle.net/1885/275565
dc.language.isoen_AUen_AU
dc.publisherOptical Society of American (OSA)en_AU
dc.relation.ispartofseries14th Pacific Rim Conference on Lasers and Electro-Optics (CLEO PR 2020)en_AU
dc.rights© 2020 OSA © 2020 The Author(s)en_AU
dc.sourceProceedings of the 14th Pacific Rim Conference on Lasers and Electro-Optics (CLEO PR 2020)en_AU
dc.source.urihttps://www.osa.org/en-us/meetings/global_calendar/events/14th_pacific_rim_conference_on_lasers_and_electro-/en_AU
dc.titleOptical frequency comb generation using low stress reactive sputtered silicon nitride waveguidesen_AU
dc.typeConference paperen_AU
local.bibliographicCitation.startpageC2C.3en_AU
local.contributor.affiliationFrigg, Andreas, RMIT Universityen_AU
local.contributor.affiliationBoes, Andreas, RMIT Universityen_AU
local.contributor.affiliationRen, Guanghui, RMIT Universityen_AU
local.contributor.affiliationNguyen, Thach, RMIT Universityen_AU
local.contributor.affiliationChoi, Duk, College of Science, ANUen_AU
local.contributor.affiliationGees, Silvio, Evatec Ltd.en_AU
local.contributor.affiliationMoss, David J, Swinburne University of Technologyen_AU
local.contributor.affiliationMitchell, Arnan, RMIT Universityen_AU
local.contributor.authoruidChoi, Duk, u4219275en_AU
local.description.embargo2099-12-31
local.description.notesImported from ARIESen_AU
local.description.refereedYes
local.identifier.absfor510204 - Photonics, optoelectronics and optical communicationsen_AU
local.identifier.absfor401605 - Functional materialsen_AU
local.identifier.ariespublicationa383154xPUB16854en_AU
local.identifier.doi10.1364/CLEOPR.2020.C2C_3en_AU
local.identifier.scopusID2-s2.0-85098061794
local.publisher.urlhttps://www.osa.orgen_AU
local.type.statusPublished Versionen_AU

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