Optical frequency comb generation using low stress reactive sputtered silicon nitride waveguides
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Authors
Frigg, Andreas
Boes, Andreas
Ren, Guanghui
Nguyen, Thach
Choi, Duk-Yong
Gees, Silvio
Moss, David J
Mitchell, Arnan
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Optical Society of American (OSA)
Abstract
We demonstrate fully CMOS-compatible anomalous dispersive SiN microring resonators with an intrinsic Q factor of 6. 6\times 10^{5} based on reactive sputtering SiN, yielding in a 250 nm wide modulation-instability frequency comb.
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Proceedings of the 14th Pacific Rim Conference on Lasers and Electro-Optics (CLEO PR 2020)
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Restricted until
2099-12-31