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Optical frequency comb generation using low stress reactive sputtered silicon nitride waveguides

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Date

2020

Authors

Frigg, Andreas
Boes, Andreas
Ren, Guanghui
Nguyen, Thach
Choi, Duk-Yong
Gees, Silvio
Moss, David J
Mitchell, Arnan

Journal Title

Journal ISSN

Volume Title

Publisher

Optical Society of American (OSA)

Abstract

We demonstrate fully CMOS-compatible anomalous dispersive SiN microring resonators with an intrinsic Q factor of 6. 6\times 10^{5} based on reactive sputtering SiN, yielding in a 250 nm wide modulation-instability frequency comb.

Description

Keywords

Citation

URI

http://hdl.handle.net/1885/275565

Collections

ANU Research Publications

Source

Proceedings of the 14th Pacific Rim Conference on Lasers and Electro-Optics (CLEO PR 2020)

Type

Conference paper

Book Title

Entity type

Access Statement

License Rights

DOI

10.1364/CLEOPR.2020.C2C_3

Restricted until

2099-12-31

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Opticalfrequencycombgenerationusinglowstressreactive.pdf (93.57 KB)

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