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Patterning of inorganic polymer glass waveguiding films by dry etching

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dc.contributor.authorMadden, Steve
dc.contributor.authorZhang, Yang
dc.contributor.authorLuther-Davies, Barry
dc.contributor.authorCharters, Robbie
dc.date.accessioned2015-12-08T22:43:25Z
dc.date.issued2008
dc.date.updated2015-12-08T10:40:38Z
dc.description.abstractPolymer waveguides have long been of interest for low cost integrated optical devices. Inorganic Polymer glasses are a class of materials based around polysiloxanes which have many attractive features for low cost integrated optics and meet the stringent
dc.identifier.issn1605-7422
dc.identifier.urihttp://hdl.handle.net/1885/37271
dc.publisherSPIE - The International Society for Optical Engineering
dc.sourceProceedings of SPIE - Progress in Biomedical Optics and Imaging
dc.subjectKeywords: Optical waveguides; Photoresists; Reactive ion etching; Refractive index; Polymer glasses; Polymer waveguides; Reliability requirements; Integrated optics Integrated optics; Polymer waveguides; Reactive ion etching
dc.titlePatterning of inorganic polymer glass waveguiding films by dry etching
dc.typeJournal article
local.bibliographicCitation.issue680107-1
local.contributor.affiliationMadden, Steve, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationZhang, Yang, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationLuther-Davies, Barry, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationCharters, Robbie, RPO Inc
local.contributor.authoruidMadden, Steve, u4151700
local.contributor.authoruidZhang, Yang, u4098859
local.contributor.authoruidLuther-Davies, Barry, u7601418
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor091209 - Polymers and Plastics
local.identifier.ariespublicationu9912193xPUB146
local.identifier.citationvolume6801
local.identifier.doi10.1117/12.760843
local.identifier.scopusID2-s2.0-41149124099
local.type.statusPublished Version

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