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Patterning of inorganic polymer glass waveguiding films by dry etching

Date

Authors

Madden, Steve

Zhang, Yang

Luther-Davies, Barry

Charters, Robbie

Publisher

SPIE - The International Society for Optical Engineering

Abstract

Polymer waveguides have long been of interest for low cost integrated optical devices. Inorganic Polymer glasses are a class of materials based around polysiloxanes which have many attractive features for low cost integrated optics and meet the stringent

Keywords

Keywords: Optical waveguides; Photoresists; Reactive ion etching; Refractive index; Polymer glasses; Polymer waveguides; Reliability requirements; Integrated optics Integrated optics; Polymer waveguides; Reactive ion etching

URI

http://hdl.handle.net/1885/37271

Collections

ANU Research Publications

Source

Proceedings of SPIE - Progress in Biomedical Optics and Imaging

Type

Journal article

DOI

10.1117/12.760843

Restricted until

2037-12-31

Downloads

File

Description

01_Madden_Patterning_of_inorganic_2008.pdf (604.8 KB)

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