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Electron transport coefficients in O 2 magnetron discharges

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dc.contributor.authorWhite, Ronald Douglas
dc.contributor.authorRobson, Robert
dc.contributor.authorNess, Kevin F
dc.contributor.authorMakabe, T
dc.date.accessioned2015-12-13T22:52:00Z
dc.date.issued2005
dc.date.updated2015-12-11T10:48:21Z
dc.description.abstractElectron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.
dc.identifier.issn0022-3727
dc.identifier.urihttp://hdl.handle.net/1885/81348
dc.publisherInstitute of Physics Publishing
dc.sourceJournal of Physics D: Applied Physics
dc.subjectKeywords: Computer simulation; Diffusion; Electromagnetic fields; Magnetrons; Mathematical models; Oxygen; Tensors; Vectors; Boltzmann equation; Bulk electrons; Fluid modeling; Momentum transfer; Electron transitions
dc.titleElectron transport coefficients in O 2 magnetron discharges
dc.typeJournal article
local.bibliographicCitation.lastpage8
local.bibliographicCitation.startpage1
local.contributor.affiliationWhite, Ronald Douglas, James Cook University
local.contributor.affiliationRobson, Robert, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationNess, Kevin F, James Cook University
local.contributor.affiliationMakabe, T, Keio University
local.contributor.authoruidRobson, Robert, u4174013
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor020201 - Atomic and Molecular Physics
local.identifier.ariespublicationMigratedxPub9658
local.identifier.citationvolume38
local.identifier.doi10.1088/0022-3727/38/7/006
local.identifier.scopusID2-s2.0-17444383486
local.type.statusPublished Version

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