Electron transport coefficients in O 2 magnetron discharges

Date

2005

Authors

White, Ronald Douglas
Robson, Robert
Ness, Kevin F
Makabe, T

Journal Title

Journal ISSN

Volume Title

Publisher

Institute of Physics Publishing

Abstract

Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

Description

Keywords

Keywords: Computer simulation; Diffusion; Electromagnetic fields; Magnetrons; Mathematical models; Oxygen; Tensors; Vectors; Boltzmann equation; Bulk electrons; Fluid modeling; Momentum transfer; Electron transitions

Citation

Source

Journal of Physics D: Applied Physics

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1088/0022-3727/38/7/006

Restricted until

2037-12-31