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Submicrometer-Thick Low-Loss As 2 S 3 Planar Waveguides for Nonlinear Optical Devices

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dc.contributor.authorMadden, Steve
dc.contributor.authorBulla, Douglas
dc.contributor.authorWang, Rongping
dc.contributor.authorRode, Andrei V
dc.contributor.authorLuther-Davies, Barry
dc.contributor.authorChoi, Duk-Yong
dc.date.accessioned2015-12-10T22:38:25Z
dc.date.issued2010
dc.date.updated2016-02-24T12:15:45Z
dc.description.abstractWe describe a fabrication process for and the characterization of submicrometer-thick As2S3 waveguides. Poly(methylmethacrylate) and bottom antireflective coating were employed as thin protective layers prior to photoresist patterning in order to prevent
dc.identifier.issn1041-1135
dc.identifier.urihttp://hdl.handle.net/1885/56747
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE Inc)
dc.sourceIEEE Photonics Technology Letters
dc.subjectKeywords: Alkaline developer; Bottom antireflective coating; Etched sidewalls; Fabrication process; Low loss; Nonlinear optical devices; Photoresist patterning; Propagation loss; Protective layers; Submicrometers; Surface scattering; Transverse-magnetic mode; Amorp Amorphous semiconductors; Fabrication; Nonlinear optic devices; Optical waveguides
dc.titleSubmicrometer-Thick Low-Loss As 2 S 3 Planar Waveguides for Nonlinear Optical Devices
dc.typeJournal article
local.bibliographicCitation.issue7
local.bibliographicCitation.lastpage497
local.bibliographicCitation.startpage495
local.contributor.affiliationChoi, Duk-Yong, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMadden, Steve, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationBulla, Douglas, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWang, Rongping, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationRode, Andrei V, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationLuther-Davies, Barry, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidChoi, Duk-Yong, u4219275
local.contributor.authoruidMadden, Steve, u4151700
local.contributor.authoruidBulla, Douglas, u4031353
local.contributor.authoruidWang, Rongping, u4219061
local.contributor.authoruidRode, Andrei V, u8913168
local.contributor.authoruidLuther-Davies, Barry, u7601418
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor020503 - Nonlinear Optics and Spectroscopy
local.identifier.ariespublicationu9912193xPUB373
local.identifier.citationvolume22
local.identifier.doi10.1109/LPT.2010.2040170
local.identifier.scopusID2-s2.0-77955216176
local.identifier.thomsonID000275370700008
local.type.statusPublished Version

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