Submicrometer-Thick Low-Loss As 2 S 3 Planar Waveguides for Nonlinear Optical Devices
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Madden, Steve
Bulla, Douglas
Wang, Rongping
Rode, Andrei V
Luther-Davies, Barry
Choi, Duk-Yong
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Institute of Electrical and Electronics Engineers (IEEE Inc)
Abstract
We describe a fabrication process for and the characterization of submicrometer-thick As2S3 waveguides. Poly(methylmethacrylate) and bottom antireflective coating were employed as thin protective layers prior to photoresist patterning in order to prevent
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IEEE Photonics Technology Letters
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2037-12-31
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