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Implications of laser-doping parameters and contact opening size on contact resistivity

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dc.contributor.authorHuyeng, Jonas
dc.contributor.authorErnst, Marco
dc.contributor.authorFong, Kean Chern
dc.contributor.authorWalter, Daniel
dc.contributor.authorBlakers, Andrew
dc.coverage.spatialWaikoloa Village, USA
dc.date.accessioned2024-02-15T00:35:27Z
dc.date.createdJune 10-15 2018
dc.date.issued2018
dc.date.updated2022-10-02T07:19:39Z
dc.description.abstractAdvanced silicon solar cells implement complex structures on both front and rear side. Laser processing has been shown to be a versatile and cost-effective technology for such applications. Local silicon doping or contact opening via ablation are two established process steps. In this work, we investigate their influence on the quality of local contacts with a focus on contact resistivity. We determine values for ρC down to 70 μΩ cm2 and 30 μΩ cm2 for phosphorus and boron respectively, on a simple test structure with the help of three-dimensional numerical simulations.en_AU
dc.description.sponsorshipJ.D.H acknowledges funding by the center of renewable energy of the University of Freiburg, within the interdisciplinary graduate school “DENE”.en_AU
dc.format.mimetypeapplication/pdfen_AU
dc.identifier.isbn9781538685297en_AU
dc.identifier.urihttp://hdl.handle.net/1885/313618
dc.language.isoen_AUen_AU
dc.publisherIEEEen_AU
dc.relation.ispartofseries7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018en_AU
dc.rights© 2018 IEEEen_AU
dc.source2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSECen_AU
dc.subjectContact openingen_AU
dc.subjectcontact resistivityen_AU
dc.subjectlaser ablationen_AU
dc.subjectlaser dopingen_AU
dc.subjectmetallizationen_AU
dc.subjectsiliconen_AU
dc.titleImplications of laser-doping parameters and contact opening size on contact resistivityen_AU
dc.typeConference paperen_AU
local.bibliographicCitation.lastpage1012en_AU
local.bibliographicCitation.startpage1008en_AU
local.contributor.affiliationHuyeng, Jonas, Fraunhofer Institute for Solar Energy Systemsen_AU
local.contributor.affiliationErnst, Marco, College of Engineering and Computer Science, ANUen_AU
local.contributor.affiliationFong, Kean, College of Engineering and Computer Science, ANUen_AU
local.contributor.affiliationWalter, Daniel, College of Engineering and Computer Science, ANUen_AU
local.contributor.affiliationBlakers, Andrew, College of Engineering and Computer Science, ANUen_AU
local.contributor.authoruidErnst, Marco, u5457130en_AU
local.contributor.authoruidFong, Kean, u4448270en_AU
local.contributor.authoruidWalter, Daniel, u4131215en_AU
local.contributor.authoruidBlakers, Andrew, u9113453en_AU
local.description.embargo2099-12-31
local.description.notesImported from ARIESen_AU
local.description.refereedYes
local.identifier.absfor400808 - Photovoltaic power systemsen_AU
local.identifier.absseo170804 - Solar-photovoltaic energyen_AU
local.identifier.ariespublicationu3102795xPUB212en_AU
local.identifier.doi10.1109/PVSC.2018.8547209en_AU
local.identifier.scopusID2-s2.0-85059883277
local.publisher.urlhttps://ieeexplore.ieee.org/en_AU
local.type.statusPublished Versionen_AU

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