Cultural advice

The Australian National University acknowledges, celebrates and pays our respects to the Ngunnawal and Ngambri people of the Canberra region and to all First Nations Australians on whose traditional lands we meet and work, and whose cultures are among the oldest continuing cultures in human history.

Aboriginal and Torres Strait Islander peoples are advised that ANU Library collections may include images, names, voices, and other representations of deceased persons.

Material in the collection may contain terms, language or views that reflect the period in which the item was created and may be considered inappropriate today.

The Role of Oxygen on the Stability of Gettering of Metals to Cavities in Silicon

Simple item page
dc.contributor.authorWilliams, James
dc.contributor.authorConway, Martin
dc.contributor.authorWong-Leung, Jennifer
dc.contributor.authorDeenapanray, Prakash
dc.contributor.authorPetravic, Mladen
dc.contributor.authorBrown, Richard Alan
dc.contributor.authorEaglesham, D
dc.contributor.authorJacobson, D
dc.date.accessioned2015-12-13T23:34:45Z
dc.date.issued1999
dc.date.updated2015-12-12T09:37:24Z
dc.description.abstractThe effect of oxygen implanted into epitaxial Si layers on the ability to getter Au to nanocavities, previously formed by H implantation and annealing, has been studied by Rutherford backscattering, transmission electron microscopy, and secondary ion mass spectrometry. We demonstrate that oxygen is gettered to cavities during extended annealing at 950 °C. Furthermore, the arrival of oxygen at cavities is not only shown to inhibit subsequent attempts to getter Au to cavities, but also to eject chemisorbed Au from the cavity walls. Similar behavior is observed in Czochralski Si, where the source of oxygen is within the Si itself.
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/1885/93600
dc.publisherAmerican Institute of Physics (AIP)
dc.sourceApplied Physics Letters
dc.titleThe Role of Oxygen on the Stability of Gettering of Metals to Cavities in Silicon
dc.typeJournal article
local.bibliographicCitation.issue16
local.bibliographicCitation.lastpage2426
local.bibliographicCitation.startpage2424
local.contributor.affiliationWilliams, James, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationConway, Martin, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWong-Leung, Yin-Yin (Jennifer), College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationDeenapanray, Prakash, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationPetravic, Mladen, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationBrown, Richard Alan, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationEaglesham, D, Lucent Technologies
local.contributor.affiliationJacobson, D, Lucent Technologies
local.contributor.authoruidWilliams, James, u8809701
local.contributor.authoruidConway, Martin, u9300106
local.contributor.authoruidWong-Leung, Yin-Yin (Jennifer), u9607716
local.contributor.authoruidDeenapanray, Prakash, u4018937
local.contributor.authoruidPetravic, Mladen, u8905251
local.contributor.authoruidBrown, Richard Alan, u401151
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.ariespublicationMigratedxPub24981
local.identifier.citationvolume75
local.identifier.scopusID2-s2.0-0000983912
local.type.statusPublished Version

Downloads

Original bundle

Now showing 1 - 1 of 1
Thumbnail Image
Name:
01_Williams_The_Role_of_Oxygen_on_the_1999.pdf
Size:
478.71 KB
Format:
Adobe Portable Document Format
Download

Collections

ANU Research Publications

DSpace software copyright © 2002-2026 LYRASIS