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Analysis of multi-layer ERBS spectra

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dc.contributor.authorMarmitt, G. G.
dc.contributor.authorRosa, L. F. S.
dc.contributor.authorNandi, S. K.
dc.contributor.authorVos, M.
dc.date.accessioned2015-05-07T03:19:44Z
dc.date.available2015-05-07T03:19:44Z
dc.date.issued2015-02-21
dc.date.updated2016-06-14T08:28:04Z
dc.description.abstractA systematic way of analysis of multi-layer electron Rutherford backscattering spectra is described. The approach uses fitting in terms of physical meaningful parameters. Simultaneous analysis then becomes possible for spectra taken at different incoming energies and measurement geometries. Examples are given to demonstrate the level of detail that can be resolved by this technique.
dc.description.sponsorshipThis work was realized with support from CNPq, Conselho Nacional de Desenvolvimento Científico e Tecnológico – Brazil and the Australian Research Council.en_AU
dc.identifier.issn0368-2048en_AU
dc.identifier.urihttp://hdl.handle.net/1885/13402
dc.publisherElsevier
dc.rights© 2015 Elsevier B.V.
dc.sourceJournal of Electron Spectroscopy and Related Phenomena
dc.subjectElectron Rutherford backscattering
dc.subjectSurface analysis
dc.subjectDepth profiling
dc.titleAnalysis of multi-layer ERBS spectra
dc.typeJournal article
dcterms.dateAccepted2015-02-14
local.bibliographicCitation.lastpage32en_AU
local.bibliographicCitation.startpage26en_AU
local.contributor.affiliationMarmitt, G. G., Research School of Physics and Engineering, The Australian National Universityen_AU
local.contributor.affiliationVos, M., Research School of Physics and Engineering, The Australian National Universityen_AU
local.contributor.authoruidu9700295en_AU
local.identifier.absfor020200 - ATOMIC, MOLECULAR, NUCLEAR, PARTICLE AND PLASMA PHYSICS
local.identifier.absfor091207 - Metals and Alloy Materials
local.identifier.absfor100712 - Nanoscale Characterisation
local.identifier.ariespublicationa383154xPUB1221
local.identifier.citationvolume202en_AU
local.identifier.doi10.1016/j.elspec.2015.02.009en_AU
local.identifier.scopusID2-s2.0-84924359014
local.publisher.urlhttp://www.elsevier.com/en_AU
local.type.statusPublished Versionen_AU

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