Analysis of multi-layer ERBS spectra

Marmitt, G. G.; Rosa, L. F. S.; Nandi, S. K.; Vos, M.

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Analysis of multi-layer ERBS spectra

Date

2015-02-21

Authors

Marmitt, G. G.

Rosa, L. F. S.

Nandi, S. K.

Vos, M.

Publisher

Elsevier

Abstract

A systematic way of analysis of multi-layer electron Rutherford backscattering spectra is described. The approach uses fitting in terms of physical meaningful parameters. Simultaneous analysis then becomes possible for spectra taken at different incoming energies and measurement geometries. Examples are given to demonstrate the level of detail that can be resolved by this technique.