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Rutherford backscattering using electrons as projectiles: Underlying principles and possible applications

Date

Authors

Went, Michael

Vos, Maarten

Publisher

Elsevier

Abstract

Ion beam analysis is the method of choice for studying the composition of layers with a thickness exceeding several tens of Å. Recently it has become clear that elastic scattering of keV electrons can be used to determine the surface composition of relat

Keywords

Keywords: Elastic scattering; Electron scattering; Electron spectroscopy; Ion beams; Surface analysis; Surface structure; Ion beam analysis; Ion scattering; Thick layers; Rutherford backscattering spectroscopy Electron-scattering; Rutherford backscattering; Surface analysis

URI

http://hdl.handle.net/1885/39897

Collections

ANU Research Publications

Source

Nuclear Instruments and Methods in Physics Research: Section B

Type

Journal article

DOI

10.1016/j.nimb.2008.01.059

Restricted until

2037-12-31

Downloads

File

Description

01_Went_Rutherford_backscattering_2008.pdf (587.46 KB)