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Clusterization of vacancy defects in ZnO irradiated with 2 MeV O+

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Zubiaga, A
Tuomisto, F
Coleman, Victoria A
Jagadish, Chennupati

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Elsevier

Abstract

Slow positrons have been used to study ZnO layers grown on a-axis sapphire and irradiated by 2 MeV O+ ions to fluences from 1012 cm-2 to 1017 cm-2. At low fluences Zn vacancies are observed, and their introduction rate is estimated as 2000 cm-1. At the highest fluences of 1016-1017 cm-2 vacancy clusters are formed. The extent of the primary damage and its recovery is discussed.

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Applied Surface Science

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