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Fabrication of submicron structures by three-dimensional laser lithography

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dc.contributor.authorShishkin, I. I.
dc.contributor.authorRybin, M. V.
dc.contributor.authorSamusev, K. B.
dc.contributor.authorLimonov, M. F.
dc.contributor.authorKiyan, R. V.
dc.contributor.authorChichkov, B. N.
dc.contributor.authorBelov, P. A.
dc.contributor.authorKivshar, Yuri
dc.date.accessioned2015-08-19T02:48:01Z
dc.date.available2015-08-19T02:48:01Z
dc.date.issued2014-07
dc.description.abstractAs a demonstration of unique capabilities of three dimensional laser lithography, an example complex shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.en_AU
dc.description.sponsorshipThis study was partially supported by the Government of the Russian Federation (project no. 074U01) and the Russian Foundation for Basic Research (project no. 130200186).en_AU
dc.format4 pagesen_AU
dc.identifier.issn0021-3640en_AU
dc.identifier.urihttp://hdl.handle.net/1885/14793
dc.publisherMAIK Nauka/Interperiodica, Russian Federationen_AU
dc.rights© Pleiades Publishing, Ltd., 2014 http://www.sherpa.ac.uk/romeo/issn/0021-3640/ Author's post-print on any open access repository after 12 months after publication (Sherpa/Romeo as of 27/10/2015).en_AU
dc.sourceJETP Lettersen_AU
dc.subjectlaser lithographyen_AU
dc.subjectthree dimensionalen_AU
dc.subjectmicroobject and photonic crystalsen_AU
dc.subjectwoodpileen_AU
dc.subjectpermittivityen_AU
dc.titleFabrication of submicron structures by three-dimensional laser lithographyen_AU
dc.typeJournal articleen_AU
local.bibliographicCitation.issue9en_AU
local.bibliographicCitation.lastpage534en_AU
local.bibliographicCitation.startpage531en_AU
local.contributor.affiliationKivshar, Yuri S., Nonlinear Physics Centre, CPMS Research School of Physics and Engineering, The Australian National Universityen_AU
local.contributor.authoruidu9307695en_AU
local.identifier.citationvolume99en_AU
local.identifier.doi10.1134/S0021364014090112en_AU
local.identifier.essn1090-6487en_AU
local.publisher.urlhttp://www.maik.rssi.ru/en_AU
local.type.statusAccepted Versionen_AU

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