Fabrication of submicron structures by three-dimensional laser lithography
Date
Authors
Shishkin, I. I.
Rybin, M. V.
Samusev, K. B.
Limonov, M. F.
Kiyan, R. V.
Chichkov, B. N.
Belov, P. A.
Kivshar, Yuri
Journal Title
Journal ISSN
Volume Title
Publisher
MAIK Nauka/Interperiodica, Russian Federation
Abstract
As a demonstration of unique capabilities of three dimensional laser lithography, an example complex shape
microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by
this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of
the permittivity contrast and the filling factor.
Description
Citation
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Source
JETP Letters