Fabrication of submicron structures by three-dimensional laser lithography

Authors

Shishkin, I. I.
Rybin, M. V.
Samusev, K. B.
Limonov, M. F.
Kiyan, R. V.
Chichkov, B. N.
Belov, P. A.
Kivshar, Yuri

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MAIK Nauka/Interperiodica, Russian Federation

Abstract

As a demonstration of unique capabilities of three dimensional laser lithography, an example complex shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

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Source

JETP Letters

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