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Instability in a low-pressure inductively coupled oxygen plasma

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dc.contributor.authorCorr, Cormac
dc.contributor.authorSteen, PG
dc.contributor.authorGraham, W G
dc.date.accessioned2015-12-07T22:46:42Z
dc.date.issued2003
dc.date.updated2015-12-07T11:44:59Z
dc.description.abstractA reproducible instability, which appears similar to those reported previously, has been observed and studied in a low-pressure 13.56 MHz inductively coupled gaseous electronics conference rf cell operating in oxygen. The instability has been observed in
dc.identifier.issn0963-0252
dc.identifier.urihttp://hdl.handle.net/1885/25885
dc.publisherInstitute of Physics Publishing
dc.sourcePlasma Sources Science and Technology
dc.subjectKeywords: Electron energy levels; Light modulation; Negative ions; Oxygen; Plasma oscillations; Plasma stability; Positive ions; Pressure effects; Probability distributions; Electron energy distribution function; Gas pressure; Inductively coupled oxygen plasma; Neg
dc.titleInstability in a low-pressure inductively coupled oxygen plasma
dc.typeJournal article
local.bibliographicCitation.lastpage272
local.bibliographicCitation.startpage2695
local.contributor.affiliationCorr, Cormac, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationSteen, PG, Queen's University Belfast
local.contributor.affiliationGraham, W G, Queen's University Belfast
local.contributor.authoruidCorr, Cormac, u4321701
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor020204 - Plasma Physics; Fusion Plasmas; Electrical Discharges
local.identifier.ariespublicationu4048219xPUB41
local.identifier.citationvolume12
local.identifier.doi10.1088/0963-0252/12/2/318
local.identifier.scopusID2-s2.0-0038283094
local.type.statusPublished Version

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