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Instability in a low-pressure inductively coupled oxygen plasma

Date

Authors

Corr, Cormac

Steen, PG

Graham, W G

Publisher

Institute of Physics Publishing

Abstract

A reproducible instability, which appears similar to those reported previously, has been observed and studied in a low-pressure 13.56 MHz inductively coupled gaseous electronics conference rf cell operating in oxygen. The instability has been observed in

Keywords

Keywords: Electron energy levels; Light modulation; Negative ions; Oxygen; Plasma oscillations; Plasma stability; Positive ions; Pressure effects; Probability distributions; Electron energy distribution function; Gas pressure; Inductively coupled oxygen plasma; Neg

URI

http://hdl.handle.net/1885/25885

Collections

ANU Research Publications

Source

Plasma Sources Science and Technology

Type

Journal article

DOI

10.1088/0963-0252/12/2/318

Restricted until

2037-12-31

Downloads

File

Description

01_Corr_Instability_in_a_low-pressure_2003.pdf (218.52 KB)

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