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Low loss, plasma beam assisted reactive magnetron sputtered silicon nitride films for optical applications

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dc.contributor.authorFrigg, Andreas
dc.contributor.authorBoes, Andreas
dc.contributor.authorRen, Guanghui
dc.contributor.authorChoi, Duk-Yong
dc.contributor.authorGees, Silvio
dc.contributor.authorMitchell, Arnan
dc.coverage.spatialSanta Ana Pueblo, United States
dc.date.accessioned2023-09-28T04:02:08Z
dc.date.createdJune 2-7 2019
dc.date.issued2019
dc.date.updated2022-08-07T08:16:35Z
dc.description.abstractCMOS-compatible SiN layers with ultra-low roughness were deposited using plasma beam assisted reactive sputtering. Material losses below 0.1 dB/cm making it a promising deposition method for photonic integrated circuits and multilayer coatings.en_AU
dc.format.mimetypeapplication/pdfen_AU
dc.identifier.isbn978-194358058-3en_AU
dc.identifier.urihttp://hdl.handle.net/1885/300291
dc.language.isoen_AUen_AU
dc.publisherOptical Society of American (OSA)en_AU
dc.relation.ispartofseriesOptical Interference Coatings Conference, OIC 2019en_AU
dc.sourceOptics InfoBase Conference Papers Volume Part F162-OIC 2019, 2019en_AU
dc.titleLow loss, plasma beam assisted reactive magnetron sputtered silicon nitride films for optical applicationsen_AU
dc.typeConference paperen_AU
local.bibliographicCitation.lastpage3en_AU
local.bibliographicCitation.startpage1en_AU
local.contributor.affiliationFrigg, Andreas, RMIT Universityen_AU
local.contributor.affiliationBoes, Andreas, RMIT Universityen_AU
local.contributor.affiliationRen, Guanghui, RMIT Universityen_AU
local.contributor.affiliationChoi, Duk, College of Science, ANUen_AU
local.contributor.affiliationGees, Silvio, Evatec Ltd.en_AU
local.contributor.affiliationMitchell, Arnan, RMIT Universityen_AU
local.contributor.authoruidChoi, Duk, u4219275en_AU
local.description.embargo2099-12-31
local.description.notesImported from ARIESen_AU
local.description.refereedYes
local.identifier.absfor401600 - Materials engineeringen_AU
local.identifier.absseo280120 - Expanding knowledge in the physical sciencesen_AU
local.identifier.ariespublicationa383154xPUB14061en_AU
local.identifier.doi10.1364/OIC.2019.WB.4en_AU
local.identifier.scopusID2-s2.0-85085638434
local.publisher.urlhttps://opg.optica.org/en_AU
local.type.statusPublished Versionen_AU

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