Nanostencil Lithography for fabrication of III-V nanostructures

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dc.contributor.authorVora, Kaushal
dc.contributor.authorKarouta, Fouad
dc.contributor.authorJagadish, Chennupati
dc.coverage.spatialSan Diego United States of America
dc.date.accessioned2015-12-10T22:58:29Z
dc.date.createdAugust 27-29 2013
dc.date.issued2013
dc.date.updated2015-12-10T08:07:07Z
dc.description.abstractNanostencil Lithography (NStL), while comparatively still in infant stages, is proving to be a viable option for low-cost and high resolution fabrication. An ideal stencil for NStL consists of a low-stressed silicon nitride membrane supported on a silicon
dc.identifier.isbn9780819496669
dc.identifier.urihttp://hdl.handle.net/1885/60872
dc.publisherSPIE - The International Society for Optical Engineering
dc.relation.ispartofseriesNanoengineering: Fabrication, Properties, Optics, and Devices X
dc.rightsAuthor/s retain copyrighten_AU
dc.sourceProceedings of SPIE - The International Society for Optical Engineering
dc.titleNanostencil Lithography for fabrication of III-V nanostructures
dc.typeConference paper
dcterms.accessRightsOpen Accessen_AU
local.bibliographicCitation.startpage88161B-1 - 88161B-7
local.contributor.affiliationVora, Kaushal, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationKarouta, Fouad, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidVora, Kaushal, u4734923
local.contributor.authoruidKarouta, Fouad, u4703981
local.contributor.authoruidJagadish, Chennupati, u9212349
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor020504 - Photonics, Optoelectronics and Optical Communications
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
local.identifier.ariespublicationU3594520xPUB570
local.identifier.doi10.1117/12.2022609
local.identifier.scopusID2-s2.0-84886708233
local.identifier.thomsonID000325972900023
local.type.statusPublished Version

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