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Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

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dc.contributor.authorHan, Ting
dc.contributor.authorMadden, Steve
dc.contributor.authorBulla, Douglas
dc.contributor.authorDebbarma, Sukhanta
dc.contributor.authorLuther-Davies, Barry
dc.coverage.spatialMunich Germany
dc.date.accessioned2015-12-07T22:43:21Z
dc.date.createdMay 22-26 2011
dc.date.issued2011
dc.date.updated2016-02-24T11:26:09Z
dc.description.abstractIn this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As2S3 rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.
dc.identifier.isbn9781457712234
dc.identifier.urihttp://hdl.handle.net/1885/24973
dc.publisherEuropean Physical Society
dc.relation.ispartofseriesEuropean Conference on Lasers and Electro-Optics (CLEO/Europe 2011)
dc.sourceEuropean Conference on Lasers and Electro-Optics (CLEO/Europe) 2011
dc.subjectKeywords: Chalcogenide glass; Glass waveguides; Low loss; Nano-imprint; Polydimethylsiloxane PDMS; Rib waveguides; Soft stamps; Thermal nanoimprint lithography; Wafer scale; Electron optics; Glass; Glass lasers; Microchannels; Nanoimprint lithography; Optics; Phase
dc.titleDirect molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp
dc.typeConference paper
local.contributor.affiliationHan, Ting, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMadden, Steve, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationBulla, Douglas, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationDebbarma, Sukhanta, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationLuther-Davies, Barry, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidHan, Ting, u4353785
local.contributor.authoruidMadden, Steve, u4151700
local.contributor.authoruidBulla, Douglas, u4031353
local.contributor.authoruidDebbarma, Sukhanta, u4736827
local.contributor.authoruidLuther-Davies, Barry, u7601418
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor020504 - Photonics, Optoelectronics and Optical Communications
local.identifier.absfor020503 - Nonlinear Optics and Spectroscopy
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
local.identifier.ariespublicationu4882357xPUB35
local.identifier.doi10.1109/CLEOE.2011.5943254
local.identifier.scopusID2-s2.0-80052284695
local.type.statusPublished Version

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