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Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

Date

Authors

Han, Ting

Madden, Steve

Bulla, Douglas

Debbarma, Sukhanta

Luther-Davies, Barry

Publisher

European Physical Society

Abstract

In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As2S3 rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.

Keywords

Keywords: Chalcogenide glass; Glass waveguides; Low loss; Nano-imprint; Polydimethylsiloxane PDMS; Rib waveguides; Soft stamps; Thermal nanoimprint lithography; Wafer scale; Electron optics; Glass; Glass lasers; Microchannels; Nanoimprint lithography; Optics; Phase

URI

http://hdl.handle.net/1885/24973

Collections

ANU Research Publications

Source

European Conference on Lasers and Electro-Optics (CLEO/Europe) 2011

Type

Conference paper

DOI

10.1109/CLEOE.2011.5943254

Restricted until

2037-12-31

Downloads

File

Description

01_Han_Direct_molding_Chalcogenide_2011.pdf (265.51 KB)