The Effect of Au and O Implantation on the Etch Rate of CVD Diamond

Date

2004

Authors

Leech, P W
Reeves, G K
Holland, A S
Ridgway, Mark C

Journal Title

Journal ISSN

Volume Title

Publisher

Elsevier

Abstract

Diamond films were implanted with Au or O ions at multiple energies in order to produce a uniform region of C vacancies. Analysis of the implanted films by Raman spectroscopy has shown that the proportion of non-diamond or amorphous carbon increased with

Description

Keywords

Keywords: Amorphization; Chemical vapor deposition; Epitaxial growth; Etching; Gold; Ion implantation; Raman spectroscopy; Surface roughness; Bias energy; Post-implanted surfaces; Diamond films Diamond films; Etching; Ion implantation; Raman spectroscopy

Citation

Source

Applied Surface Science

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1016/S0169-4332(03)00949-8

Restricted until

2037-12-31