The Effect of Au and O Implantation on the Etch Rate of CVD Diamond
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Leech, P W
Reeves, G K
Holland, A S
Ridgway, Mark C
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Elsevier
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Diamond films were implanted with Au or O ions at multiple energies in order to produce a uniform region of C vacancies. Analysis of the implanted films by Raman spectroscopy has shown that the proportion of non-diamond or amorphous carbon increased with
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Applied Surface Science
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2037-12-31
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