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Temperature dependence of blistering in hydrogen implanted Si and Ge

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Authors

Pyke, Daniel
Elliman, Robert
McCallum, Jeffrey C.

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Elsevier

Abstract

The temperature dependence of hydrogen blistering rates are measured in (100) Si, (111) Si and (100) Ge substrates implanted with 40 keV H-ions to a fluence of 6 × 1016 H cm-2 using real-time imaging of samples during annealing. The time taken for bliste

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Nuclear Instruments and Methods in Physics Research: Section B

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Restricted until

2037-12-31