Temperature dependence of blistering in hydrogen implanted Si and Ge
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Pyke, Daniel
Elliman, Robert
McCallum, Jeffrey C.
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Elsevier
Abstract
The temperature dependence of hydrogen blistering rates are measured in (100) Si, (111) Si and (100) Ge substrates implanted with 40 keV H-ions to a fluence of 6 × 1016 H cm-2 using real-time imaging of samples during annealing. The time taken for bliste
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Nuclear Instruments and Methods in Physics Research: Section B
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2037-12-31
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