Local digital etching and infiltration for tuning of a H1- Cavity in deeply etched InP/InGaAsP/InP photonic crystals
Date
2009
Authors
Kicken, H H J E
Alkemade, P.F.A.
van der Heijden, Rob W.
Karouta, Fouad
Nötzel, Richard
van der Drift, E.
Salemink, H W M
Journal Title
Journal ISSN
Volume Title
Publisher
IEEE
Abstract
Local post-production processing of single holes in a planar photonic crystal is demonstrated by selectively opening a masking layer by focused ion beam milling. Local tuning was optically demonstrated by both blueshifting and subsequent red-shifting the
Description
Keywords
Keywords: Focused ion beam milling; Local tuning; Masking layers; Planar photonic crystal; Post processing; Post-production; Q-factors; Resonance frequencies; Resonant frequencies; Selective tuning; Single hole; Indium; Indium phosphide; Natural frequencies; Point
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Source
Conference Proceedings - International Conference on Indium Phosphide and Related Materials
Type
Conference paper
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Restricted until
2037-12-31
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