Local digital etching and infiltration for tuning of a H1- Cavity in deeply etched InP/InGaAsP/InP photonic crystals
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Kicken, H H J E
Alkemade, P.F.A.
van der Heijden, Rob W.
Karouta, Fouad
Nötzel, Richard
van der Drift, E.
Salemink, H W M
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IEEE
Abstract
Local post-production processing of single holes in a planar photonic crystal is demonstrated by selectively opening a masking layer by focused ion beam milling. Local tuning was optically demonstrated by both blueshifting and subsequent red-shifting the
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Conference Proceedings - International Conference on Indium Phosphide and Related Materials
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2037-12-31
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