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Local digital etching and infiltration for tuning of a H1- Cavity in deeply etched InP/InGaAsP/InP photonic crystals

Date

Authors

Kicken, H H J E

Alkemade, P.F.A.

van der Heijden, Rob W.

Karouta, Fouad

Nötzel, Richard

van der Drift, E.

Salemink, H W M

Publisher

IEEE

Abstract

Local post-production processing of single holes in a planar photonic crystal is demonstrated by selectively opening a masking layer by focused ion beam milling. Local tuning was optically demonstrated by both blueshifting and subsequent red-shifting the

Keywords

Keywords: Focused ion beam milling; Local tuning; Masking layers; Planar photonic crystal; Post processing; Post-production; Q-factors; Resonance frequencies; Resonant frequencies; Selective tuning; Single hole; Indium; Indium phosphide; Natural frequencies; Point

URI

http://hdl.handle.net/1885/71795

Collections

ANU Research Publications

Source

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Type

Conference paper

DOI

10.1109/ICIPRM.2009.5012419

Restricted until

2037-12-31

Downloads

File

Description

01_Kicken_Local_digital_etching_and_2009.pdf (303.7 KB)

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