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Sidewall slopes of SU-8 HARMST using deep x-ray lithography

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dc.contributor.authorVora, Kaushal
dc.contributor.authorShew, B.Y.
dc.contributor.authorHarvey, E.C.
dc.contributor.authorHayes, J.P.
dc.contributor.authorPeele, Andrew Gareth
dc.date.accessioned2015-12-10T22:59:22Z
dc.date.issued2008
dc.date.updated2015-12-10T08:12:19Z
dc.description.abstractWe describe a model that predicts sidewall slope in SU-8 high aspect ratio microstructures made using x-ray lithography. Our experimental results are in accordance with our model and we demonstrate that essentially zero sidewall taper can be obtained under certain conditions. We use our results to explore the feasibility of optimizing a structure simultaneously for slope and surface roughness.
dc.identifier.issn0960-1317
dc.identifier.urihttp://hdl.handle.net/1885/61052
dc.publisherIOP Publishing
dc.sourceJournal of Micromechanics and Microengineering
dc.subjectKeywords: Aspect ratio; Mathematical models; Microstructure; Optimization; Surface roughness; Aspect ratio microstructures; X-ray lithography; Lithography
dc.titleSidewall slopes of SU-8 HARMST using deep x-ray lithography
dc.typeJournal article
local.bibliographicCitation.lastpage7
local.bibliographicCitation.startpage1
local.contributor.affiliationVora, Kaushal, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationShew, B.Y., National Synchrotron Radiation Research Center
local.contributor.affiliationHarvey, E.C., Swinburne University of Technology
local.contributor.affiliationHayes, J.P., Swinburne University of Technology
local.contributor.affiliationPeele, Andrew Gareth, University of Melbourne
local.contributor.authoruidVora, Kaushal, u4734923
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor020404 - Electronic and Magnetic Properties of Condensed Matter; Superconductivity
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
local.identifier.ariespublicationU3594520xPUB584
local.identifier.citationvolume18
local.identifier.doi10.1088/0960-1317/18/3/035037
local.identifier.scopusID2-s2.0-42549152456
local.type.statusPublished Version

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