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Si-SiO2 interface passivation by plasma NH3 and atomic H

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dc.contributor.authorJin, Haoen_AU
dc.contributor.authorWeber, Klausen_AU
dc.contributor.authorJayaprasad, Aen_AU
dc.contributor.authorSmith, Paulen_AU
dc.contributor.authorBlakers, Andrewen_AU
dc.date.accessioned2015-12-07T22:52:48Z
dc.date.issued2006
dc.date.updated2015-12-07T12:33:03Z
dc.description.abstractPlasma ammonia treatment at 400°C leads to de-passivation of a fully hydrogenated Si-SiO2 interface, and to passivation of a fully de-hydrogenated Si-SiO2 interface. Plasma NH3 exposure causes irreversible Si surface damage and degradation of thermal sta
dc.identifier.issn1001-0521
dc.identifier.urihttp://hdl.handle.net/1885/27587
dc.publisherZhongguo Youse Jinshu Xuehui
dc.sourceRare Metals
dc.subjectKeywords: Defects; Electric properties; Hydrogen; Interfaces (materials); Passivation; Radiation damage; Silicon; Thermodynamic stability; Atomic hydrogen; Plasma ammonia treatment; Silica Atomic H; EPR; Plasma NH3; SiO2
dc.titleSi-SiO2 interface passivation by plasma NH3 and atomic H
dc.typeJournal article
local.bibliographicCitation.issueSpecial Issue
local.bibliographicCitation.lastpage149
local.bibliographicCitation.startpage146
local.contributor.affiliationJin, Hao, College of Engineering and Computer Science, ANU
local.contributor.affiliationWeber, Klaus, College of Engineering and Computer Science, ANU
local.contributor.affiliationJayaprasad, A, University of Konstanz
local.contributor.affiliationSmith, Paul, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationBlakers, Andrew, College of Engineering and Computer Science, ANU
local.contributor.authoruidJin, Hao, u4065013
local.contributor.authoruidWeber, Klaus, u9116880
local.contributor.authoruidSmith, Paul, u8605230
local.contributor.authoruidBlakers, Andrew, u9113453
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.absfor091299 - Materials Engineering not elsewhere classified
local.identifier.absseo850504 - Solar-Photovoltaic Energy
local.identifier.ariespublicationu4251866xPUB52
local.identifier.citationvolume25
local.identifier.doi10.1016/S1001-0521(07)60062-X
local.identifier.scopusID2-s2.0-33846813950
local.type.statusPublished Version

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