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Direct-write non-linear photolithography for semiconductor nanowire characterization

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dc.contributor.authorParkinson, Patricken_AU
dc.contributor.authorJiang, Nianen_AU
dc.contributor.authorGao, Qiangen_AU
dc.contributor.authorJagadish, Chennupatien_AU
dc.contributor.authorTan, Hark Hoeen_AU
dc.date.accessioned2015-12-10T23:18:17Z
dc.date.issued2012
dc.date.updated2016-02-24T08:38:15Z
dc.description.abstractA practical bottleneck prohibiting the rapid, confident and damage-free electrical contacting of vapour-liquid-solid grown nanowires arises from the random spatial distribution and variation in quality of the nanowires, and the contact dimensions required. Established techniques such as electron-beam lithography or focused ion-beam deposition have challenges in scaling, damage or complexity that can make a large statistical sample difficult. We present a direct laser-writing technique to allow rapid electrical contacting of nanowires on a large variety of substrates.
dc.identifier.issn0957-4484
dc.identifier.urihttp://hdl.handle.net/1885/65559
dc.publisherInstitute of Physics Publishing
dc.sourceNanotechnology
dc.subjectKeywords: Damage-free; Direct write; Laser-writing technique; Semiconductor nanowire; Statistical samples; Chemical modification; Photolithography; Nanowires
dc.titleDirect-write non-linear photolithography for semiconductor nanowire characterization
dc.typeJournal article
local.bibliographicCitation.issue33
local.bibliographicCitation.lastpage5
local.bibliographicCitation.startpage1
local.contributor.affiliationParkinson, Patrick, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJiang, Nian, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationGao, Qiang, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationTan, Hoe Hark, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidParkinson, Patrick, u4869537
local.contributor.authoruidJiang, Nian, u4902336
local.contributor.authoruidGao, Qiang, u4006742
local.contributor.authoruidTan, Hoe Hark, u9302338
local.contributor.authoruidJagadish, Chennupati, u9212349
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor091204 - Elemental Semiconductors
local.identifier.absfor100706 - Nanofabrication, Growth and Self Assembly
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
local.identifier.ariespublicationf5625xPUB1124
local.identifier.citationvolume23
local.identifier.doi10.1088/0957-4484/23/33/335704
local.identifier.scopusID2-s2.0-84864591373
local.identifier.thomsonID000307251600016
local.type.statusPublished Version

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