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Direct-write non-linear photolithography for semiconductor nanowire characterization

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Authors

Parkinson, Patrick
Jiang, Nian
Gao, Qiang
Jagadish, Chennupati
Tan, Hark Hoe

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Publisher

Institute of Physics Publishing

Abstract

A practical bottleneck prohibiting the rapid, confident and damage-free electrical contacting of vapour-liquid-solid grown nanowires arises from the random spatial distribution and variation in quality of the nanowires, and the contact dimensions required. Established techniques such as electron-beam lithography or focused ion-beam deposition have challenges in scaling, damage or complexity that can make a large statistical sample difficult. We present a direct laser-writing technique to allow rapid electrical contacting of nanowires on a large variety of substrates.

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Source

Nanotechnology

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Restricted until

2037-12-31