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Phosphorus gettering in multicrystalline silicon studied by neutron activation analysis

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Macdonald, D
Cuevas, Andres
Kinomura, A
Nakano, Yukihiro

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Neutron Activation Analysis (NAA) is a powerful and sensitive technique for measuring trace amounts of impurities. In this work, we have applied NAA to the problem of identifying metallic impurities within the bulk of solar-grade cast multicrystalline silicon (mc-Si) wafers. In particular, the change in concentrations of these contaminants after phosphorus gettering is monitored, revealing a marked reduction in some metal species, but not in others.

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