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Low loss stoichiometric TeO2 thin films and waveguides

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dc.contributor.authorVu, Khu
dc.contributor.authorMadden, Steve
dc.contributor.authorLuther-Davies, Barry
dc.coverage.spatialMunich Germany
dc.date.accessioned2015-12-10T22:27:11Z
dc.date.createdJune 14-19 2009
dc.date.issued2009
dc.date.updated2016-02-24T12:15:01Z
dc.description.abstractStoichiometric low loss Tellurium dioxide, TeO2, films have been produced by reactive magnetron RF sputtering. Long rib waveguides with very low loss are fabricated using reactive ion etching techniques. As-deposited TeO2 films and waveguides with propagation loss around or below 0.1dB/cm at 1550nm have been achieved.
dc.identifier.isbn9781424440801
dc.identifier.urihttp://hdl.handle.net/1885/54086
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE Inc)
dc.relation.ispartofseriesEuropean Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference (CLEO/EQEC 2009)
dc.sourceProceedings of CLEO / Europe-EQEC 2009
dc.subjectKeywords: 1550 nm; Low loss; Propagation loss; Reactive ion; Rf-sputtering; Rib waveguides; Tellurium dioxide; Electron optics; Lasers; Quantum electronics; Tellurium; Tellurium compounds; Waveguides; Reactive ion etching
dc.titleLow loss stoichiometric TeO2 thin films and waveguides
dc.typeConference paper
local.bibliographicCitation.startpage2
local.contributor.affiliationVu, Khu, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMadden, Steve, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationLuther-Davies, Barry, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidVu, Khu, u2515789
local.contributor.authoruidMadden, Steve, u4151700
local.contributor.authoruidLuther-Davies, Barry, u7601418
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor090606 - Photonics and Electro-Optical Engineering (excl. Communications)
local.identifier.ariespublicationu9912193xPUB290
local.identifier.scopusID2-s2.0-71049147551
local.type.statusPublished Version

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