Effect of Ion-implantation on Forming and Resistive-Switching Response of NiO Thin films
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Elliman, Robert
Nawaz (Saleh), Muhammad
Kim, Sung-I
Venkatachalam, Dinesh
Kim, Tae-Hyun
Belay, Kidane
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Cambridge Journals
Abstract
The forming voltage and set/reset response of sputter-deposited NiO thin films is studied as a function of implant fluence for samples implanted with Ni and O ions. The forming voltage of the films is shown to decrease with increasing ion fluence and to scale with the damage production rate of the different ions. In contrast, the set/reset response of the films was largely unaffected by the ion-implantation. These results are discussed in terms of the filamentary model of conduction and the thermochemical model of resistive switching.
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Materials Research Society Symposium Proceedings