Determination of thickness and composition of high-k dielectrics using high-energy electrons

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dc.contributor.authorGrande, Pedro
dc.contributor.authorVos, Maarten
dc.contributor.authorVenkatachalam, Dinesh
dc.contributor.authorNandi, Sanjoy
dc.contributor.authorElliman, Robert
dc.date.accessioned2015-12-10T22:58:06Z
dc.date.issued2013
dc.date.updated2016-02-24T10:19:39Z
dc.description.abstractWe demonstrate the application of high-energy elastic electron backscattering to the analysis of thin (2-20 nm) HfO2 overlayers on oxidized Si substrates. The film composition and thickness are determined directly from elastic scattering peaks characteris
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/1885/60696
dc.publisherAmerican Institute of Physics (AIP)
dc.rightsAuthor/s retain copyrighten_AU
dc.sourceApplied Physics Letters
dc.subjectKeywords: Elastic electron backscattering; Film composition; High spatial resolution; High-energy electron; High-k dielectric; Medium energy; Rutherford back-scattering spectrometry; Thin film analysis; Hafnium oxides; Rutherford backscattering spectroscopy; Scanni
dc.titleDetermination of thickness and composition of high-k dielectrics using high-energy electrons
dc.typeJournal article
dcterms.accessRightsOpen Accessen_AU
local.bibliographicCitation.lastpage4
local.bibliographicCitation.startpage071911/1
local.contributor.affiliationGrande, Pedro, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationVos, Maarten, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationVenkatachalam, Dinesh, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationNandi, Sanjoy, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationElliman, Robert, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidGrande, Pedro, u5296468
local.contributor.authoruidVos, Maarten, u9700295
local.contributor.authoruidVenkatachalam, Dinesh, u4575027
local.contributor.authoruidNandi, Sanjoy, u4939839
local.contributor.authoruidElliman, Robert, u9012877
local.description.notesImported from ARIES
local.identifier.absfor020406 - Surfaces and Structural Properties of Condensed Matter
local.identifier.absfor020401 - Condensed Matter Characterisation Technique Development
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
local.identifier.ariespublicationU3594520xPUB557
local.identifier.citationvolume103
local.identifier.doi10.1063/1.4818637
local.identifier.scopusID2-s2.0-84882438695
local.identifier.thomsonID000323769000026
local.type.statusPublished Version

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